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HORIBA堀場(chǎng)濃度計(jì)半導(dǎo)體

產(chǎn)品型號(hào)：濕法過(guò)程控制CS-151F4

產(chǎn)品品牌：HORIBA堀場(chǎng)濃度計(jì)

產(chǎn)品介紹：

HORIBA堀場(chǎng)CS-100 系列為半導(dǎo)體制程各種清洗和刻蝕工藝的藥液提供完整的、高精度的化學(xué)藥液濃度計(jì)。除高速響應(yīng)和緊湊設(shè)計(jì)等特點(diǎn)外，濃度計(jì)還可實(shí)時(shí)測(cè)量每種組分的濃度，通過(guò)報(bào)警提醒化學(xué)藥液變化和自動(dòng)供應(yīng)的時(shí)間。具備執(zhí)行短周期測(cè)量的能力，可準(zhǔn)確檢測(cè)濃度變化。

詳細(xì)介紹

HORIBA堀場(chǎng)CS-100 系列為半導(dǎo)體制程各種清洗和刻蝕工藝的藥液提供完整的、高精度的化學(xué)藥液濃度計(jì)。除高速響應(yīng)和緊湊設(shè)計(jì)等特點(diǎn)外，濃度計(jì)還可實(shí)時(shí)測(cè)量每種組分的濃度，通過(guò)報(bào)警提醒化學(xué)藥液變化和自動(dòng)供應(yīng)的時(shí)間。具備執(zhí)行短周期測(cè)量的能力，可準(zhǔn)確檢測(cè)濃度變化。

Model	CS-151F1	CS-152F1	CS-150F1
Target of measurement	SC-1 (ammonia/hydrogen peroxide aqueous solution)	SC-2 (hydrochloric acid/hydrogen peroxide aqueous solution)	SPM (sulfuric acid/hydrogen peroxide aqueous solution)
Target of measurement	Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible.
Measurement principle	Absorption spectrometry
Concentration computation principle	Temperature-compensated multivariate analysis
Measurement range (mass %)	NH3: 0.00% to 1.00% H2O2: 0.00% to 5.00% H2O: 94.0% to 100.0%	HCI: 0.00% to 2.00% H2O2: 0.00% to 2.00% H2O: 96.0% to 100.0%	H2SO4: 70.0% to 96.0% H2O2: 0.00% to 10.00% H2O: 4.0% to 30.0%
Repeatability (mass %) (within ±1% room temperature)	NH3: ±0.15% H2O2: ±0.30% H2O: ±1.5%	HCI: ±0.15% H2O2: ±0.15 % H2O: ±1.5%	H2SO4: ±0.50% H2O2: ±0.50% H2O: ±1.5%
Repeatability (mass %) (within ±1% room temperature)	?Repeatability for the list above is for the cell unit type.Please contact us for the repeatability of the in-line cell type. ?Differences in the above list may occur depending on measurement range.(Please see our website for details.)
Sample solution temperature	20 to 80: (when using Inline cell) 20 to 30: (when using cell unit)
Measurement cycle	Approx. 3 seconds
Content of LCD and input	? 1st component: measured concentration value (%)?? ?Error code ? 2nd component: measured concentration value (%)???Parallel concentration alarm output invalid status ? 3rd component: measured concentration value (%)???Serial/parallel status ? 1st and 2nd components: concentration alarm status??Background compensation data
RS-232C serial input	? Serial/parallel status switching?? ??????????Parallel concentration alarm output status ? Measurement data transfer request?????????(valid/invalid) ? 1st and 2nd component concentration alarm setting???Target measurement solution switching
Parallel input	12 to 30 V DC (photocoupler insulated)????????? Parallel concentration alarm output ? Target measurement solution switching ? Background compensation
Parallel output	Open collector output (photocoupler insulated)?????? 1st component concentration alarm, 4 types Max. current when on:???????????????? ? 2nd component concentration alarm, 4 types DC 5 mA (no internal protection resistor)????? ? Device error Max. impressed voltage when off: 30 V DC?????? ? Measuring ? Target measurement solution type ? Background compensation status
Solution temperature input	Terminal block connection (M3 terminal screws) ? Platinum resistance temperature sensor: Pt100 (Pt100 sensor should be prepared by customers)
Analog output	? 1st component concentration alarm, 4 types: 4 to 20 mA ? 2nd component concentration alarm, 4 types: 4 to 20 mA ?We also support other measurement ranges. Please specify when ordering.
Fiber optic cable	Dedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature)
Sample cell	We can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions.
Power supply	100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA
Dimensions	205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part)
Weight	Approx. 11 kg

scrollable

Note: Please consult us regarding concentration monitors for chemical solutions other than those given above.

Schematics

Concentration monitor

Inline cell Cell unit

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Schematics

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